A New Method for Detecting Leaks in MEMS Accelerometers at Wafer-Level.
Ulrich BaehrMarvin FreierMatthew LewisWolfgang RosenstielOliver BringmannPublished in: IEEE SENSORS (2020)
Keyphrases
- high accuracy
- preprocessing
- synthetic data
- theoretical analysis
- experimental evaluation
- computational complexity
- error rate
- classification accuracy
- similarity measure
- fully automatic
- classification method
- detection method
- prior knowledge
- objective function
- knn
- dynamic programming
- cost function
- evolutionary algorithm
- pairwise
- image segmentation
- optimization method