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A study on process-compatibility in CMOS-first MEMS-last integration.

Kazuhiro TakahashiMakoto MitaHiroyuki FujitaKazuhiro SuzukiHideyuki FunakiKazuhiko ItayaHiroshi Toshiyoshi
Published in: CICC (2008)
Keyphrases
  • experimental study
  • power consumption
  • real time
  • low cost
  • theoretical framework