Design and fabrication of in-plane resonant microcantilevers.

Yuehua Wu Grigory Panaitov Yi Zhang Norbert Klein

Published in: Microelectron. J. (2008)

Keyphrases

design decisions
neural network
case study
d objects
information retrieval
knowledge based systems
design space
data sets
optimal design
integrated circuit
design principles
computer aided
design process
high speed
evolutionary algorithm
three dimensional
artificial intelligence