Bipolar pulse width modulation driver for MEMS electrostatic actuator arrays.
Steven L. GarverickMichael L. NagyMichael J. KaneJun GuoPublished in: CICC (2003)
Keyphrases
- pulse width modulation
- single phase
- fuzzy control
- control system
- induction motor
- control method
- closed loop
- loading conditions
- dc motor
- speed control
- operating conditions
- output voltage
- control algorithm
- input output
- neural network controller
- power supply
- control scheme
- real time
- pid controller
- dynamic response
- genetic algorithm