Computer Simulation of 3D Mask Image Based on Self-Adaptive Model in VLSI Lithography.

Pengfei Cao Lin Cheng Xiao-Ping Zhang

Published in: CSIE (3) (2009)

Keyphrases

computer simulation
computational model
statistical model
probabilistic model
high speed
cost function
probability distribution
management system
theoretical analysis
mathematical model
experimental data
statistical methods
formal model