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An efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks.
Tobias Gergs
Borislav Borislavov
Jan Trieschmann
Published in:
CoRR (2021)
Keyphrases
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neural network
probabilistic model
process model
neural network model
mathematical model
experimental data
artificial neural networks
statistical model
magnetic field
hidden markov models
probability distribution
management system
behavioral model