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On scheduling a photolithography area containing cluster tools.
Sreenath Chalil Madathil
Siddhartha Nambiar
Scott J. Mason
Mary E. Kurz
Published in:
Comput. Ind. Eng. (2018)
Keyphrases
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scheduling problem
data clustering
clustering algorithm
scheduling algorithm
software tools
resource allocation
user friendly
manufacturing systems
parallel machines
information retrieval
end users
building blocks
round robin
flexible manufacturing systems