Capacity planning with sequential time constraints under various control policies in the back-end of wafer fabrications.
Ying-Mei TuHsin-Nan ChenPublished in: J. Oper. Res. Soc. (2010)
Keyphrases
- back end
- capacity planning
- control policies
- capacity expansion
- user friendly
- supply chain
- building blocks
- reinforcement learning
- stochastic programming
- data management
- data types
- supply chain management
- optimal policy
- motion control
- control strategies
- machine learning
- finite horizon
- control policy
- search space
- real time
- model checking
- control system
- physical constraints
- search algorithm
- artificial intelligence
- genetic algorithm