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Analysis and Experiment of Self-Differential Eddy Current Displacement Sensor for AMBs Used in Molecular Pump.

Kun WangLisheng ZhangBangcheng HanShaohua Chen
Published in: IEEE Trans. Instrum. Meas. (2018)
Keyphrases
  • eddy current
  • sensor networks
  • artificial intelligence
  • data acquisition
  • quantitative analysis
  • database
  • real time
  • e learning
  • website
  • image analysis
  • statistical analysis