AI-Based Localization and Classification of Visual Anomalies on Semiconductor Devices.
Minh Khai LeJason Zi Jie ChiaDennis PeskesPublished in: eIT (2023)
Keyphrases
- semiconductor devices
- machine learning
- visual information
- supervised learning
- pattern recognition
- decision trees
- artificial intelligence
- visual features
- training set
- classification accuracy
- case based reasoning
- unsupervised learning
- support vector machine
- data management
- intelligent systems
- anomaly detection
- class labels
- classification method
- feature selection