Markov-chain based missing value estimation method for tool commonality analysis in semiconductor manufacturing.

Rong-Huei Chen Chih-Ming Fan

Published in: WSC (2012)

Keyphrases

markov chain
monte carlo simulation
missing values
markov model
steady state
monte carlo method

transition matrix
parameter estimation
monte carlo
semiconductor manufacturing
gaussian distribution

data analysis
data sets
missing data
random walk
incomplete data

state space
maximum likelihood estimation
probabilistic model
objective function
neural network