Markov-chain based missing value estimation method for tool commonality analysis in semiconductor manufacturing.
Rong-Huei ChenChih-Ming FanPublished in: WSC (2012)
Keyphrases
- markov chain
- monte carlo simulation
- missing values
- markov model
- steady state
- monte carlo method
- transition matrix
- parameter estimation
- monte carlo
- semiconductor manufacturing
- gaussian distribution
- data analysis
- data sets
- missing data
- random walk
- incomplete data
- state space
- maximum likelihood estimation
- probabilistic model
- objective function
- neural network