Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology.

Chen-Yang Lin Cheng-Chih Hsu Ching-Liang Dai

Published in: Micromachines (2015)

Keyphrases

high speed
silicon on insulator
case study
low cost
cost effective
power consumption
rapid development
data processing
computer systems
cmos image sensor
metal oxide semiconductor