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An IEC 61499 based run-to-run controller for chemical mechanical planarization process.

Kiah Mok GohBenny TjahjonoAbdul ManafAnton J. R. Aendenroomer
Published in: ETFA (2008)
Keyphrases
  • control system
  • neural network
  • real world
  • artificial intelligence
  • search engine
  • information systems
  • evolutionary algorithm
  • power system
  • control strategy
  • control algorithm