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An IEC 61499 based run-to-run controller for chemical mechanical planarization process.
Kiah Mok Goh
Benny Tjahjono
Abdul Manaf
Anton J. R. Aendenroomer
Published in:
ETFA (2008)
Keyphrases
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control system
neural network
real world
artificial intelligence
search engine
information systems
evolutionary algorithm
power system
control strategy
control algorithm