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Out of plane vs in plane flexural behaviour of thin polysilicon films: Mechanical characterization and application of the Weibull approach.
Fabrizio Cacchione
Alberto Corigliano
Biagio De Masi
Caterina Riva
Published in:
Microelectron. Reliab. (2005)
Keyphrases
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three dimensional
databases
real time
random access memory