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A temperature control system used for improving resonant frequency drift of MEMS gyroscopes.
Rui Guan
Chunhua He
Dachuan Liu
Qiancheng Zhao
Zhenchuan Yang
Guizhen Yan
Published in:
NEMS (2015)
Keyphrases
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resonant frequency
fuzzy control
temperature control
microstrip antenna
pid control
pid controller
control algorithm
magnetic field
real time
artificial neural networks
control system
global optimization
closed loop