Probabilistic local reconstruction for k-NN regression and its application to virtual metrology in semiconductor manufacturing.
Seung-kyung LeePilsung KangSungzoon ChoPublished in: Neurocomputing (2014)
Keyphrases
- knn
- semiconductor manufacturing
- k nearest neighbor
- process control
- nearest neighbor
- k nearest neighbour
- discrete event simulation
- text categorization
- distance function
- similarity search
- production system
- uncertain data
- voting methods
- text classification
- bayesian networks
- support vector machine
- control system
- neural network
- camera calibration
- feature selection
- linear regression
- nearest neighbour
- probabilistic model
- bayes error
- data sets
- web document classification
- model selection
- gaussian processes
- semi supervised
- regression problems
- learning algorithm
- mixed data