A novel method to measure the sidewall angle of MEMS structures.
Qiang QinQiancheng ZhaoFang YangDacheng ZhangGuizhen YanPublished in: IEEE SENSORS (2017)
Keyphrases
- similarity measure
- preprocessing
- significant improvement
- clustering method
- main contribution
- computer vision
- fully automatic
- high precision
- segmentation method
- detection method
- high accuracy
- experimental evaluation
- dynamic programming
- probabilistic model
- computational cost
- cost function
- synthetic data
- correlation coefficient
- medical images
- error rate
- prior knowledge
- classification method
- artificial neural networks
- data sets
- evaluation method