Design, prototyping, modeling and control of a MEMS nanopositioning stage.

Y. Zhu Ali Bazaei S. O. Reza Moheimani Mehmet R. Yuce

Published in: ACC (2011)

Keyphrases

design process
case study
high level synthesis
design decisions
initial stages
modeling tool
controller design
design space
modeling language
data acquisition
control method
data sets
embedded systems
design methodology
control structure
building blocks
control system
control program
learning algorithm
databases