Hidden Markov model-based predictive maintenance in semiconductor manufacturing: A genetic algorithm approach.
Jakob KinghorstOmid GeramifardMing LuoHian-Leng ChanKhoo YongJens FolmerMinjie ZouBirgit Vogel-HeuserPublished in: CASE (2017)
Keyphrases
- semiconductor manufacturing
- genetic algorithm
- process control
- discrete event simulation
- multi objective
- fitness function
- simulated annealing
- production system
- evolutionary algorithm
- genetic programming
- artificial neural networks
- genetic operators
- optimization method
- genetic algorithm ga
- evolutionary computation
- hybrid genetic algorithm
- software maintenance
- real coded
- data sets
- population size
- prize collecting
- mutation operator
- ant colony optimization
- metaheuristic
- knowledge base
- search engine
- information retrieval