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CMOS-MEMS Test-Key for Extracting Wafer-Level Mechanical Properties.

Wan-Chun ChuangYuh-Chung HuPei-Zen Chang
Published in: Sensors (2012)
Keyphrases
  • mechanical properties
  • composite materials
  • integrated circuit
  • finite element model
  • image sequences
  • synthetic and real images
  • cmos image sensor