A Novel Particle Sizing Method for Nano Abrasives in CMP Slurry by Using Fluorescent Nano Probe.
Terutake HayashiToshiki SeriSyuhei KurokawaPublished in: Int. J. Autom. Technol. (2017)
Keyphrases
- detection method
- preprocessing
- similarity measure
- objective function
- optimization algorithm
- cost function
- computational cost
- high accuracy
- experimental evaluation
- segmentation method
- support vector machine svm
- high precision
- fully automatic
- dynamic programming
- prior knowledge
- pairwise
- numerical methods
- classification method
- neural network
- segmentation algorithm
- theoretical analysis
- particle swarm optimization
- decision trees