Scheduling Close-Down Processes Subject to Wafer Residency Constraints for Single-Arm Cluster Tools.
Qinghua ZhuMengchu ZhouYan QiaoNaiqi WuPublished in: SMC (2015)
Keyphrases
- resource constraints
- wafer fabrication
- software tools
- scheduling algorithm
- constrained clustering
- massively parallel
- data sets
- decision support
- scheduling problem
- objective function
- clustering algorithm
- data clustering
- hierarchical clustering
- user friendly
- linear constraints
- precedence constraints
- meeting scheduling
- neural network