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Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process.

Ki Bum LeeChang Ouk Kim
Published in: J. Intell. Manuf. (2020)
Keyphrases
  • convolutional neural network
  • virtual environment
  • augmented reality
  • camera calibration
  • process control
  • computer vision
  • information systems
  • decision trees
  • feature vectors