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A Dual-Axis Resonant Accelerometer Based on Electrostatic Stiffness Modulation in Epi-Seal Process.
Seungyong Shin
Haoran Wen
Hyun-Keun Kwon
Gabrielle D. Vukasin
Thomas W. Kenny
Farrokh Ayazi
Published in:
IEEE SENSORS (2019)
Keyphrases
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feedback loop
activity recognition