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Channel Stress Engineering Through Source/Drain Recess Optimization and Its Process Variation Study for 5 nm-node FinFETs.

Dawei WangTao LiuXin SunKun ChenJingwen YangChunlei WuMin XuDavid Wei Zhang
Published in: ASICON (2021)
Keyphrases
  • optimization process
  • empirical studies
  • artificial intelligence
  • global optimization
  • oil and gas industry
  • data mining
  • information systems
  • design process
  • graph structure