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Advanced TCAD for predictive FinFETs Vth mismatch using full 3D process/device simulation.

E. M. BaziziAlban ZakaTom HerrmannFrancis BenistantJ. H. M. TinJ. P. GohL. JiangM. JoshiH. van MeerK. Korablev
Published in: ESSDERC (2014)
Keyphrases
  • information retrieval
  • case study
  • simulation model
  • database
  • learning algorithm
  • knowledge base
  • decision trees
  • expert systems
  • wireless sensor networks
  • process model
  • development process