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Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers.
Jianqiang Han
Ri-sheng Feng
Yan Li
Sen-lin Li
Qing Li
Published in:
J. Zhejiang Univ. Sci. C (2013)
Keyphrases
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