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Modeling and Design Parameter Optimization to Improve the Sensitivity of a Bimorph Polysilicon-Based MEMS Sensor for Helium Detection.

Sulaiman MohaidatFadi Alsaleem
Published in: Sensors (2024)
Keyphrases
  • parameter optimization
  • genetic algorithm
  • real time
  • feature extraction
  • training data
  • support vector
  • particle swarm optimization
  • genetic algorithm ga