An electrostatic vertical comb-drive micromirror with self-aligned assembly.

Yanjun Fan Can Cui Huijun Yu Wenjiang Shen Zhi Wang Jun Li

Published in: NEMS (2017)

Keyphrases

hard disk drive
assembly process
fluidized bed
solid state
neural network
information systems
cooperative
printed circuit boards
visually guided
image processing
web services
image sequences
data structure
process planning