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Enhancing open-loop control of MEMS using linear electrostatic levitation actuators.

Mohammad MousaviMohammad AlzgoolShahrzad Towfighian
Published in: IEEE SENSORS (2021)
Keyphrases
  • mathematical model
  • real time
  • control system
  • linear systems
  • neural network
  • learning algorithm
  • multiscale
  • expert systems
  • degrees of freedom
  • control strategy
  • linear complexity