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A 3-axis PZT-based MEMS gyroscope in 0.18μm CMOS.
Imran Ahmed
David Halupka
Bertram Leesti
James A. Cherry
Robert McKenzie
Alireza Nilchi
Hamed Mazhab-Jafari
W. Martin Snelgrove
Raymond Chik
Published in:
ESSCIRC (2012)
Keyphrases
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analog to digital converter
high speed
cross section
fiber optic
low cost
power consumption
circuit design
low voltage
analog vlsi
vlsi circuits
low power
data sets
focal plane
cmos image sensor
hd video