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SEM-based nanoprobing on 32 and 28 nm CMOS devices challenges for semiconductor failure analysis.

Erik PaulHolger HerzogSören JansenChristian HobertEckhard Langer
Published in: Microelectron. Reliab. (2014)
Keyphrases
  • statistical analysis
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  • genetic algorithm
  • data analysis
  • low cost
  • key issues
  • neural network
  • e learning
  • quantitative analysis