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High sensitivity capacitive humidity sensor with a novel polyimide design fabricated by MEMS technology.
Ji-Hong Kim
Sung-Min Hong
Jang-Sub Lee
Byung-Moo Moon
Kunnyun Kim
Published in:
NEMS (2009)
Keyphrases
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high sensitivity
case study
fiber bragg grating
high speed
analog to digital converter
data acquisition
interaction design
cmos image sensor
cost effective
engineering education
participatory design
optical fiber
computer systems
design process
design space
enabling technology
design requirements
real time