Login / Signup
Roughness characterisation of gas phase micromachining process suitable for fabricating silicon based microsystems.
Muthukuruman Packirisamy
Ion Stiharu
L. Flores
Published in:
Int. J. Manuf. Technol. Manag. (2005)
Keyphrases
</>
genetic algorithm
database
neural network
decision making
website
multiscale
high speed
process model