Induced Start Dynamic Sampling for Wafer Metrology Optimization.
Gian Antonio SustoMarco MaggipintoFederico ZoccoSeán F. McLoonePublished in: IEEE Trans Autom. Sci. Eng. (2020)
Keyphrases
- optimization problems
- global optimization
- dynamic environments
- optimization process
- random sampling
- process control
- camera calibration
- semiconductor manufacturing
- neural network
- optimization algorithm
- monte carlo
- database
- optimization method
- markov chain
- multi objective
- computer vision
- optimization model
- learning algorithm
- discrete optimization
- optimization strategies