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Simulation study of SU-8 structures realized by single-step projection photolithography.
K. Nakamura
Y. Hirai
T. Tsuchiya
O. Tabata
Florian Larramendy
O. Paul
Published in:
IEEE SENSORS (2016)
Keyphrases
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simulation study
single step
multi step
monte carlo
integrated circuit
semi supervised
data sets
machine learning
learning algorithm
small number
x ray
manufacturing systems