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A MEMS Resonant Sensor to Measure Fluid Density and Viscosity under Flexural and Torsional Vibrating Modes.

Libo ZhaoYingjie HuTongdong WangJianjun DingXixiang LiuYulong ZhaoZhuangde Jiang
Published in: Sensors (2016)
Keyphrases
  • finite element model
  • sensor fusion
  • real time
  • similarity measure
  • sensor data
  • information theory
  • probability measure
  • distance measure
  • differential equations
  • wave propagation