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Challenges and solution approaches for the online simulation of semiconductor wafer fabs.
Daniel Noack
Marcin Mosinski
Oliver Rose
Peter Lendermann
Boon-Ping Gan
Wolfgang Scholl
Published in:
WSC (2011)
Keyphrases
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semiconductor manufacturing
strengths and weaknesses
key issues
lessons learned
application scenarios
real time
machine learning algorithms
online learning
solution quality
integer programming
data sets
closed form
simulation model
information technology
machine learning
real world
promising directions