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Neural-net computing for interpretation of semiconductor film optical ellipsometry parameters.
Gwang Hoon Park
Yoh-Han Pao
Boris Igelnik
Kurt G. Eyink
Steven R. LeClair
Published in:
IEEE Trans. Neural Networks (1996)
Keyphrases
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neural nets
neural network
feed forward
backpropagation neural networks
back propagation
artificial neural networks
sensitivity analysis
optical properties
data sets
genetic algorithm
multi layer
counter propagation
real time
decision trees
learning tasks
hidden layer