Production-Level Artificial Intelligence Applications in Semiconductor Manufacturing.
Chen-Fu ChienHans EhmJohn W. FowlerLars MönchCheng-Hung WuPublished in: WSC (2021)
Keyphrases
- semiconductor manufacturing
- artificial intelligence
- discrete event simulation
- process control
- production system
- higher level
- machine learning
- engineering design
- intelligent agents
- expert systems
- decision making
- knowledge representation
- software engineering
- intelligent systems
- multi agent
- clustering algorithm
- e learning
- information retrieval
- databases