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Validation and Verification of the Simulation Model of a Photolithography Process in Semiconductor Manufacturing.
Nirupama Nayani
Mansooreh Mollaghasemi
Published in:
WSC (1998)
Keyphrases
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simulation model
semiconductor manufacturing
process control
simulation models
discrete event
model checking
discrete event simulation
mathematical model
neural network
natural language
multistage
production system
integrated circuit