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A Fully Integrated Miniatured Capacitive Angle Encoder based on MEMS Fabrication and ASIC Implementation.

Jiahui ShiHua LiaoBowen XingBin ZhouQi WeiRong Zhang
Published in: IEEE SENSORS (2022)
Keyphrases
  • fully integrated
  • integrated circuit
  • hardware architecture
  • hardware implementation
  • design methodology
  • bit rate
  • circuit design
  • expert systems
  • service oriented
  • workflow management