Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip.

Ching-Liang Dai Po-Wei Lu Chienliu Chang Cheng-Yang Liu

Published in: Sensors (2009)

Keyphrases

high speed
analog vlsi
circuit design
evolvable hardware
low cost
sensor data
sensor networks
power dissipation
image sensor
cmos technology
low power
sigma delta
multi sensor
real time
chip design
data acquisition
single chip
focal plane
physical design
algebraic structure
sensor fusion
micron cmos