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Enhancing Sensitivity Using Electrostatic Spring in Coupling Mode-Localized Mems Accelerometer.

Z. WangX. Y. XiongK. F. WangW. H. YangZ. T. LiX. D. Zou
Published in: NEMS (2021)
Keyphrases
  • sensitivity analysis
  • high sensitivity
  • mixed mode
  • computer vision
  • three dimensional
  • electric field
  • database
  • neural network
  • genetic algorithm
  • case study
  • bayesian networks
  • special case
  • action recognition