Building energy saving performance indices for cleaner semiconductor manufacturing and an empirical study.
Chen-Fu ChienJin-Tang PengHsing-Chih YuPublished in: Comput. Ind. Eng. (2016)
Keyphrases
- energy saving
- semiconductor manufacturing
- energy consumption
- power consumption
- discrete event simulation
- process control
- wireless sensor networks
- energy efficiency
- energy management
- power saving
- air conditioning
- save energy
- global warming
- energy conservation
- power management
- energy efficient
- production system
- electricity consumption
- natural resources
- activity recognition
- data collection
- data sets