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High-speed measurement of Piezoelectric MEMS equivalent circuit parameters by Swept-sine and PRBS signals.

Mitsuo MatsumotoMasayuki KawabataYukio Kawanabe
Published in: ITC-Asia (2021)
Keyphrases
  • high speed
  • equivalent circuit
  • maximum likelihood
  • signal processing
  • expectation maximization
  • measurement data
  • search algorithm
  • magnetic field
  • operating conditions