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Model development and inverse compensator design for high speed nanopositioning.

Ralph C. SmithMurti V. SalapakaAndrew G. HatchJoshua SmithTathagata De
Published in: CDC (2002)
Keyphrases
  • high speed
  • case study
  • probabilistic model
  • statistical model
  • neural network
  • mathematical model
  • conceptual model
  • probability distribution
  • knowledge based systems
  • computational model
  • power system
  • formal model