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Using advanced simulation to aid microlithography development.
Daniel C. Cole
Eytan Barouch
Edward W. Conrad
Michael Yeung
Published in:
Proc. IEEE (2001)
Keyphrases
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simulation model
information processing
mathematical model
development environment
data structure
databases
machine learning
information retrieval
image processing
case study
multi agent
object oriented
software engineering
knowledge based systems
support systems