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Designing Highly Precise Overlay Targets for Asymmetric Sidewall Structures Using Quasi-Periodic Line Widths and Finite-Difference Time-Domain Simulation.
Hung-Chih Hsieh
Meng-Rong Wu
Xiang-Ting Huang
Published in:
Sensors (2023)
Keyphrases
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finite difference
quasi periodic
finite element
numerical analysis
partial differential equations
numerical solution
hamilton jacobi
dynamic time warping
level set
diffusion equation
data mining
multiscale
feature space