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A 12GHz bulk-micromachined RF-MEMS phase shifter by SOI layer-separation design.

Daisuke YamaneWinston SunShigeo KawasakiHiroyuki FujitaHiroshi Toshiyoshi
Published in: IEICE Electron. Express (2010)
Keyphrases
  • high speed
  • design process
  • user interface
  • radio frequency
  • neural network
  • case study
  • multiresolution
  • computer aided
  • microstrip